SH-2607TS-N - single channel suction type gas detector

A suction type detector for the detection of liquid process chemicals in the Semiconductor Industry. Chemicals like TEOS, TRIES, TMP, TMB etc. For indoor use. The output signal is 4-20 mA.

• No cross sensitivity to solvents like Iso Propyl Alcohol and Acetone
• Ionization detection principle

Documentation

Eur63-HTO-V5-web.pdf 298.77 Kb