The detection systems of Bionics Instrument have been protecting people in the semiconductor industry for over 25 years. Our systems provide a total solution for gas monitoring inside and outside the production areas. The semiconductor industry is a dynamic industry where new processes are being introduced at vast speed. Implantation, diffusion, etch and deposition processes are continuously adapted to create even smaller electronic components.

Detectors for new gases and chemicals
On a regular basis new gases and chemicals are marketed to enabe these new processes. Over the past years more and more liquid chemicals have been introduced. Because the vapours of these chemicals are often hazardous Bionics Instrument has also introduced new detectors for vapours like TEOS, TDMAT, TMP, TRIES etc. It is our policy to develop a detection solution for any new hazardous chemical being introduced to the semiconductor industry.

No cross sensitive to solvents
Bionics Instrument sensors are designed not to be cross sensitive to solvents like IPA, acetone and H₂O₂. Because these chemicals are widely used in many clean rooms the use of Bionics Instrument gas detectors will avoid many unnecessary gas alarms.

Bionics Isntrument single-point configurations
Due to the flexible, single-point configurations the Bionics Instrument gas detectors can be placed close to the point of risk. This will avoid unnecessary delays or loss of concentration during transportation of the air sample. All our sampler and diffusion type detectors provide continuous monitoring and they can be installed with almost no intrusion to the installation.

Live gas calibration
Bionics Instrument promotes on-site live gas calibration. This is the only way to guarantee the security provided by any type of gas detector. Also because insurance companies have become more stringent live gas calibration has become a requirement for many major companies in the Semiconductor Industry.